Inventor · disambiguated record
Po-Wen Yen
Also filed as: YEN PO-WEN
5 granted patents·235 citations·filing 1994–1997
84Inventor score
Files withUNITED MICROELECTRONICS CORP5
Top patents by PatentIndex Score
5 records- 0181US5637186AMethod and monitor testsite pattern for measuring critical dimension openingsUNITED MICROELECTRONICS CORP·Filed 1995·Granted Jun 10, 1997·76 cites·23 claims
- 0276US5445989AMethod of forming device isolation regionsUNITED MICROELECTRONICS CORP·Filed 1994·Granted Aug 29, 1995·61 cites·16 claims
- 0372US5580701AProcess for elimination of standing wave effect of photoresistUNITED MICROELECTRONICS CORP·Filed 1994·Granted Dec 3, 1996·36 cites·8 claims
- 0467US5413963AMethod for depositing an insulating interlayer in a semiconductor metallurgy systemUNITED MICROELECTRONICS CORP·Filed 1994·Granted May 9, 1995·52 cites·9 claims
- 0543US5773082AMethod for applying photoresist on waferUNITED MICROELECTRONICS CORP·Filed 1997·Granted Jun 30, 1998·10 cites·13 claims
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