Inventor · disambiguated record
Brett M. Herzig
Also filed as: HERZIG BRETT · HERZIG BRETT M
4 granted patents·2 pending applications·14 citations·filing 2018–2022
70Inventor score
Technology areasH10P
Files withLAM RES CORP6
Top patents by PatentIndex Score
6 records- 0189US10991550B2Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station systemLAM RES CORP·Filed 2018·Granted Apr 27, 2021·7 cites·7 claims
- 0289US10796940B2Enhanced automatic wafer centering system and techniques for sameLAM RES CORP·Filed 2018·Granted Oct 6, 2020·5 cites·34 claims
- 0380US11581214B2Enhanced automatic wafer centering system and techniques for sameLAM RES CORP·Filed 2019·Granted Feb 14, 2023·2 cites·32 claims
- 0465US11594397B2Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station systemLAM RES CORP·Filed 2021·Granted Feb 28, 2023·0 cites·13 claims
- 0553US2025232997A1Adaptive positioning systems and routines using an autocalibration wafer and a calibration wafer with cutoutsLAM RES CORP·Filed 2022·Application pending·0 cites
- 0640US2022220627A1Substrate sticking and breakage mitigationLAM RES CORP·Filed 2020·Application pending·0 cites
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