Inventor · disambiguated record
Hirofumi Kitayama
Also filed as: KITAYAMA HIROFUMI
14 granted patents·1,591 citations·filing 1989–2001
95Inventor score
Top patents by PatentIndex Score
14 records- 0198US7235137B2Conductor treating single-wafer type treating device and method for semi-conductor treatingTOKYO ELECTRON LTD·Filed 2001·Granted Jun 26, 2007·752 cites·22 claims
- 0289US5217501AVertical wafer heat treatment apparatus having dual load lock chambersTOKYO ELECTRON LTD·Filed 1991·Granted Jun 8, 1993·149 cites·20 claims
- 0387US5445486ASubstrate transferring apparatusTEL SAGAMI LTD·Filed 1994·Granted Aug 29, 1995·110 cites·9 claims
- 0487US5162047AVertical heat treatment apparatus having wafer transfer mechanism and method for transferring wafersTEL SAGAMI LTD·Filed 1991·Granted Nov 10, 1992·107 cites·8 claims
- 0586US6360762B2Method for feeding gases for use in semiconductor manufacturingFUJIKIN KK·Filed 2001·Granted Mar 26, 2002·33 cites·8 claims
- 0685US6210482B1Apparatus for feeding gases for use in semiconductor manufacturingFUJIKIN KK·Filed 1999·Granted Apr 3, 2001·74 cites·12 claims
- 0784USD378823SWafer boatTOKYO ELECTRON LTD·Filed 1995·Granted Apr 15, 1997·27 cites·1 claims
- 0881US5110248AVertical heat-treatment apparatus having a wafer transfer mechanismTEL SAGAMI LTD·Filed 1990·Granted May 5, 1992·90 cites·12 claims
- 0981US4989540AApparatus for reaction treatmentTEL SAGAMI LTD·Filed 1989·Granted Feb 5, 1991·59 cites·11 claims
- 1080US5622639AHeat treating apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Apr 22, 1997·43 cites·19 claims
- 1174US5316472AVertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatusTOKYO ELECTRON LTD·Filed 1992·Granted May 31, 1994·66 cites·24 claims
- 1267US6095806ASemiconductor wafer boat and vertical heat treating systemTOKYO ELECTRON LTD·Filed 1999·Granted Aug 1, 2000·40 cites·20 claims
- 1361US5445521AHeat treating method and deviceTOKYO ELECTRON LTD·Filed 1994·Granted Aug 29, 1995·21 cites·4 claims
- 1449US5030056ASubstrate transfer deviceTEL SAGAMI LTD·Filed 1990·Granted Jul 9, 1991·20 cites·6 claims
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