Inventor · disambiguated record
Bjoern Mader
Also filed as: MADER BJOERN
3 granted patents·33 citations·filing 2006–2008
69Inventor score
Files withXTREME TECH GMBH3
Top patents by PatentIndex Score
3 records- 0191US7365350B2Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasmaXTREME TECH GMBH·Filed 2006·Granted Apr 29, 2008·23 cites·49 claims
- 0277US7750327B2Device for the generation of a gas curtain for plasma-based EUV radiation sourcesXTREME TECH GMBH·Filed 2008·Granted Jul 6, 2010·7 cites·30 claims
- 0349US7755070B2Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation sourceXTREME TECH GMBH·Filed 2006·Granted Jul 13, 2010·3 cites·27 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →