Inventor · disambiguated record
Afshin Nickhou
Also filed as: NICKHOU AFSHIN
3 granted patents·75 citations·filing 2002–2002
73Inventor score
Technology areasH10P
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0192US7234477B2Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfacesLAM RES CORP·Filed 2002·Granted Jun 26, 2007·55 cites·30 claims
- 0271US6866051B1Megasonic substrate processing moduleLAM RES CORP·Filed 2002·Granted Mar 15, 2005·15 cites·8 claims
- 0356US6851436B1Substrate processing using a fluid re-circulation system in a wafer scrubbing systemLAM RES CORP·Filed 2002·Granted Feb 8, 2005·5 cites·16 claims
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