Inventor · disambiguated record
Eckehard D. Onkels
Also filed as: ONKELS ECKEHARD · ONKELS ECKEHARD D
22 granted patents·1 pending application·1,266 citations·filing 1995–2006
97Inventor score
Top patents by PatentIndex Score
23 records- 0199US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0298US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 0397US6317447B1Electric discharge laser with acoustic chirp correctionCYMER INC·Filed 2000·Granted Nov 13, 2001·108 cites·9 claims
- 0493US7567607B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2006·Granted Jul 28, 2009·14 cites·3 claims
- 0593US6590922B2Injection seeded F2 laser with line selection and discriminationCYMER INC·Filed 2001·Granted Jul 8, 2003·63 cites·18 claims
- 0693US6381257B1Very narrow band injection seeded F2 lithography laserCYMER INC·Filed 1999·Granted Apr 30, 2002·106 cites·14 claims
- 0793US6359922B1Single chamber gas discharge laser with line narrowed seed beamCYMER INC·Filed 1999·Granted Mar 19, 2002·102 cites·9 claims
- 0892US6466602B1Gas discharge laser long life electrodesCYMER INC·Filed 2000·Granted Oct 15, 2002·69 cites·31 claims
- 0992US6370174B1Injection seeded F2 lithography laserCYMER INC·Filed 1999·Granted Apr 9, 2002·99 cites·23 claims
- 1090US6985508B2Very narrow band, two chamber, high reprate gas discharge laser systemCYMER INC·Filed 2003·Granted Jan 10, 2006·29 cites·23 claims
- 1189US6560263B1Discharge laser having electrodes with sputter cavities and discharge peaksCYMER INC·Filed 2000·Granted May 6, 2003·35 cites·36 claims
- 1286US6556600B2Injection seeded F2 laser with centerline wavelength controlCYMER INC·Filed 2001·Granted Apr 29, 2003·27 cites·11 claims
- 1385US6801560B2Line selected F2 two chamber laser systemCYMER INC·Filed 2002·Granted Oct 5, 2004·18 cites·77 claims
- 1482US7061961B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2005·Granted Jun 13, 2006·5 cites·20 claims
- 1580US5529813AProcess for microstructuring surfaces of oriented polymeric substratesusing laser radiationDU PONT·Filed 1995·Granted Jun 25, 1996·47 cites·1 claims
- 1679US6765945B2Injection seeded F2 laser with pre-injection filterCYMER INC·Filed 2001·Granted Jul 20, 2004·16 cites·68 claims
- 1763US7058107B2Line selected F2 two chamber laser systemCYMER INC·Filed 2004·Granted Jun 6, 2006·5 cites·77 claims
- 1860US7218661B2Line selected F2 two chamber laser systemCYMER INC·Filed 2004·Granted May 15, 2007·4 cites·77 claims
- 1948US8349226B2Method of increasing the laser damage threshold of diffraction gratingsGSI HELMHOLTZZENTRUM FUR SCHWERIONENFORSCHUNG GMBH·Filed 2006·Granted Jan 8, 2013·1 cites·18 claims
- 2046US6330260B1F2 laser with visible red and IR controlCYMER INC·Filed 1999·Granted Dec 11, 2001·12 cites·31 claims
- 2140US6539042B2Ultra pure component purge system for gas discharge laserCYMER INC·Filed 2001·Granted Mar 25, 2003·0 cites·8 claims
- 2238US2002071468A1Injection seeded F2 laser with pre-injection filterFiled 2001·Application pending·0 cites
- 2332US6735236B2High power gas discharge laser with line narrowing unitCYMER INC·Filed 1999·Granted May 11, 2004·5 cites·18 claims
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