Inventor · disambiguated record

Sheng-Te Shu

Also filed as: SHU SHENG-TE

1 granted patent·16 citations·filing 2002–2002

38Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0169US6776850B2Preventative maintenance aided tool for CVD chamberTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 17, 2004·16 cites·16 claims

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