Inventor · disambiguated record
Daniel T. Mudd
Also filed as: MUDD DANIEL · MUDD DANIEL T · MUDD DANIEL THOMAS
37 granted patents·8 pending applications·823 citations·filing 1989–2025
98Inventor score
Top patents by PatentIndex Score
45 records- 0197US9958302B2Flow control system, method, and apparatusRENO TECH INC·Filed 2016·Granted May 1, 2018·14 cites·19 claims
- 0297US9188989B1Flow node to deliver process gas using a remote pressure measurement deviceMUDD DANIEL T·Filed 2012·Granted Nov 17, 2015·33 cites·13 claims
- 0397US5660207AFlow controller, parts of flow controller, and related methodTYLAN GENERAL INC·Filed 1994·Granted Aug 26, 1997·102 cites·21 claims
- 0495US11144075B2Flow control system, method, and apparatusICHOR SYSTEMS INC·Filed 2020·Granted Oct 12, 2021·5 cites·18 claims
- 0595US10782165B2Flow control system, method, and apparatusRENO TECH INC·Filed 2018·Granted Sep 22, 2020·6 cites·20 claims
- 0695US6561218B2Small internal volume fluid mass flow control apparatusFUGASITY CORP·Filed 2001·Granted May 13, 2003·64 cites·21 claims
- 0793US9690301B2Pressure based mass flow controllerRENO TECH INC·Filed 2013·Granted Jun 27, 2017·20 cites·15 claims
- 0893US5044199AFlowmeterDXL INTERNATIONAL INC·Filed 1989·Granted Sep 3, 1991·74 cites·63 claims
- 0992US10782710B2Flow control system, method, and apparatusRENO TECH INC·Filed 2019·Granted Sep 22, 2020·7 cites·20 claims
- 1092US10679880B2Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing sameRENO TECH INC·Filed 2017·Granted Jun 9, 2020·8 cites·15 claims
- 1192US8770215B1Low flow injector to deliver a low flow of gas to a remote locationMUDD DANIEL T·Filed 2012·Granted Jul 8, 2014·18 cites·18 claims
- 1291US7431045B2Flow restrictorHORIBA STEC CO LTD·Filed 2005·Granted Oct 7, 2008·34 cites·3 claims
- 1391US5850850AFlow controller, parts of flow controller, and related methodMILLIPORE CORP·Filed 1996·Granted Dec 22, 1998·59 cites·12 claims
- 1490US11003198B2Controlled delivery of process gas using a remote pressure measurement deviceRENO TECH INC·Filed 2015·Granted May 11, 2021·5 cites·19 claims
- 1589US8744784B2Diagnostic mechanism in differential pressure type mass flow controllerYASUDA TADAHIRO·Filed 2007·Granted Jun 3, 2014·23 cites·13 claims
- 1689US6443174B2Fluid mass flow control valve and method of operationFiled 2001·Granted Sep 3, 2002·39 cites·26 claims
- 1788US8376312B2Flow restrictorHORIBA LTD·Filed 2007·Granted Feb 19, 2013·23 cites·13 claims
- 1886US5285673AMethod for in-line calibration verification of mass flow metersDXL INTERNATIONAL INC·Filed 1991·Granted Feb 15, 1994·55 cites·28 claims
- 1983US5765283AMethod of making a flow controllerMILLIPORE CORP·Filed 1996·Granted Jun 16, 1998·50 cites·4 claims
- 2081US5359878AApparatus and method for in-line calibration verification of mass flow metersDXL INTERNATIONAL INC·Filed 1994·Granted Nov 1, 1994·44 cites·15 claims
- 2180US10704936B2Flow rate characteristic function identification method, flow rate characteristic function identification device, storage medium storing flow rate characteristic function identification program, and flow rate sensor or flow rate control device using themHORIBA STEC CO LTD·Filed 2017·Granted Jul 7, 2020·2 cites·7 claims
- 2280US10303189B2Flow control system, method, and apparatusRENO TECH INC·Filed 2017·Granted May 28, 2019·2 cites·15 claims
- 2379US5901741AFlow controller, parts of flow controller, and related methodMILLIPORE CORP·Filed 1995·Granted May 11, 1999·36 cites·9 claims
- 2478US5305638AMass flowmeter having non-adjustable flow splitterDXL INTERNATIONAL INC·Filed 1992·Granted Apr 26, 1994·41 cites·22 claims
- 2576US12411502B2Flow control system, method, and apparatusICHOR SYSTEMS INC·Filed 2023·Granted Sep 9, 2025·0 cites·20 claims
- 2676US2025207963A1Flow Through Pressure SensorILLINOIS TOOL WORKS·Filed 2024·Application pending·0 cites
- 2776US2025146851A1Flow control system, method, and apparatusICHOR SYSTEMS INC·Filed 2025·Application pending·0 cites
- 2873US5259243AFlow sensorDXL INTERNATIONAL INC·Filed 1991·Granted Nov 9, 1993·36 cites·21 claims
- 2971US11815920B2Flow control system, method, and apparatusICHOR SYSTEMS INC·Filed 2021·Granted Nov 14, 2023·0 cites·20 claims
- 3069US12228435B2Flow control system, method, and apparatusICHOR SYSTEMS INC·Filed 2020·Granted Feb 18, 2025·0 cites·20 claims
- 3161US9448564B2Gas delivery system for outputting fast square waves of process gas during semiconductor processingMUDD DANIEL T·Filed 2014·Granted Sep 20, 2016·1 cites·18 claims
- 3259US12181328B2Flow through pressure sensor structured to remove dead volumeILLINOIS TOOL WORKS·Filed 2020·Granted Dec 31, 2024·0 cites·20 claims
- 3359US11424148B2Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing sameICHOR SYSTEMS INC·Filed 2020·Granted Aug 23, 2022·0 cites·19 claims
- 3458US9976887B1Wider dynamic accuracy range for gas delivery devicesMUDD DANIEL T·Filed 2014·Granted May 22, 2018·1 cites·17 claims
- 3555US10036662B2Flow rate calculation system and flow rate calculation methodHORIBA STEC CO LTD·Filed 2017·Granted Jul 31, 2018·0 cites·5 claims
- 3654US5321992AMeasurement of gas flows with enhanced accuracyDXL USA·Filed 1991·Granted Jun 21, 1994·21 cites·9 claims
- 3753US2025130600A1Valve assembly and system used to control flow rate of a fluidILLINOIS TOOK WORKS INC·Filed 2023·Application pending·0 cites
- 3847US12259739B2Advanced pressure based mass flow controllers and diagnosticsILLINOIS TOOL WORKS·Filed 2019·Granted Mar 25, 2025·0 cites·18 claims
- 3945US2007089789A1Higher accuracy pressure based flow controllerMUDD DANIEL T·Filed 2006·Application pending·0 cites
- 4043US11669111B2Valve assembly and system used to control flow rate of a fluidILLINOIS TOOL WORKS·Filed 2020·Granted Jun 6, 2023·0 cites·3 claims
- 4141US10497542B2Flow control showerhead with integrated flow restrictors for improved gas delivery to a semiconductor processMUDD DANIEL T·Filed 2016·Granted Dec 3, 2019·0 cites·19 claims
- 4238US2004083807A1Higher accuracy pressure based flow controllerFiled 2003·Application pending·0 cites
- 4337US2016041564A1Reverse flow mode for regulating pressure of an accumulated volume with fast upstream bleed downMUDD DANIEL T·Filed 2015·Application pending·0 cites
- 4436US2002046612A1Fluid mass flow meter with substantial measurement rangeFUGASITY CORP·Filed 2001·Application pending·0 cites
- 4535US2016018828A1Pressure-based mass flow controller with reverse flow mode for fast bleed downMUDD DANIEL T·Filed 2015·Application pending·0 cites
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