Inventor · disambiguated record
Vlasta Brusic Kaufman
Also filed as: BRUSIC KAUFMAN VLASTA
2 granted patents·89 citations·filing 2001–2001
68Inventor score
Technology areasH10P
Files withCABOT MICROELECTRONICS CORP2
Top patents by PatentIndex Score
2 records- 0190US6447371B2Chemical mechanical polishing slurry useful for copper/tantalum substratesCABOT MICROELECTRONICS CORP·Filed 2001·Granted Sep 10, 2002·58 cites·25 claims
- 0282US6589100B2Rare earth salt/oxidizer-based CMP methodCABOT MICROELECTRONICS CORP·Filed 2001·Granted Jul 8, 2003·31 cites·19 claims
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