Inventor
KATAOKA SHO
JP3 patents
Patents
3 patentsUS11028106B2Jun 8, 2021
Method for producing tetraalkoxysilane
AIST0 citations58
US12153347B2Nov 26, 2024
Organically modified metal oxide nanoparticle, method for producing the same, EUV photoresist material, and method for producing etching mask
AIST1 citations51
US11747724B2Sep 5, 2023
Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method
AIST0 citations44