Inventor · disambiguated record

Tseng-Lung Chen

Also filed as: CHEN TSENG-LUNG

1 granted patent·8 citations·filing 1998–1998

31Inventor score

Technology areasG03F

Files withUNITED MICROELECTRONICS CORP1

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1 record

0138US6166392AExposure for performing synchronized off-axis alignmentUNITED MICROELECTRONICS CORP·Filed 1998·Granted Dec 26, 2000·8 cites·11 claims

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