Inventor · disambiguated record
Makoto Sambu
Also filed as: SAMBU MAKOTO
7 granted patents·2 pending applications·506 citations·filing 2002–2023
84Inventor score
Top patents by PatentIndex Score
9 records- 0196US6503079B2Substrate processing apparatus and method for manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2002·Granted Jan 7, 2003·478 cites·18 claims
- 0276USD965740SGas supply nozzle for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2021·Granted Oct 4, 2022·6 cites·1 claims
- 0369USD920935SBoat for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2018·Granted Jun 1, 2021·12 cites·1 claims
- 0458USD940669SBoat for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2019·Granted Jan 11, 2022·7 cites·1 claims
- 0555US2023207335A1Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0651US2022298642A1Substrate Processing Apparatus and Method of Manufacturing Semiconductor DeviceKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 0735US11967512B2Substrate processing apparatus and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2020·Granted Apr 23, 2024·0 cites·17 claims
- 0834USD918011SDoor latch for semiconductor manufacturing equipmentKOKUSAI ELECTRIC CORP·Filed 2019·Granted May 4, 2021·1 cites·1 claims
- 0931USD944661SCalibrator for wafer handling robotsKOKUSAI ELECTRIC CORP·Filed 2019·Granted Mar 1, 2022·2 cites·1 claims
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