Inventor · disambiguated record

Matthew Anthony Sorna

Also filed as: SORNA MATTHEW ANTHONY

1 granted patent·0 citations·filing 2020–2020

11Inventor score

Technology areasH10P

Files withASML HOLDING NV1

Top patents by PatentIndex Score

1 record

0150US11988971B2Lithographic apparatus, substrate table, and methodASML HOLDING NV·Filed 2020·Granted May 21, 2024·0 cites·20 claims

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Matthew Anthony Sorna — Patent Inventor | PatentIndex