Inventor · disambiguated record

Henk F. D. Linders

Also filed as: LINDERS HENK F D · LINDERS HENK FREDERIK DIRK

2 granted patents·284 citations·filing 1991–1993

72Inventor score

Technology areasG03F

Files withASM LITHOGRAPHY1 PHILIPS CORP1

Top patents by PatentIndex Score

2 records

0196US5191200AImaging apparatus having a focus-error and/or tilt detection devicePHILIPS CORP·Filed 1991·Granted Mar 2, 1993·200 cites·52 claims
0290US5481362AApparatus for projecting a mask pattern on a substrateASM LITHOGRAPHY·Filed 1993·Granted Jan 2, 1996·84 cites·28 claims

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