Inventor · disambiguated record
Alexey Olegovich Polyakov
Also filed as: POLYAKOV ALEXEY · POLYAKOV ALEXEY OLEGOVICH
12 granted patents·1 pending application·14 citations·filing 2013–2021
84Inventor score
Top patents by PatentIndex Score
13 records- 0190US10342108B2Metrology methods, radiation source, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jul 2, 2019·5 cites·20 claims
- 0285US10416555B2Lithographic patterning process and resists to use thereinASML NETHERLANDS BV·Filed 2015·Granted Sep 17, 2019·3 cites·27 claims
- 0377US11232960B2Pick-and-place tool having multiple pick up elementsASML NETHERLANDS BV·Filed 2017·Granted Jan 25, 2022·2 cites·20 claims
- 0469US11996267B2Particle beam apparatus, defect repair method, lithographic exposure process and lithographic systemASML NETHERLANDS BV·Filed 2019·Granted May 28, 2024·1 cites·20 claims
- 0569US9723290B2Method for generating, transmitting and receiving stereoscopic images and relating devicesS I SV EL SOCIETA' ITALIANA PER LO SVILUPPO DELL'ELETTRONICA S P A·Filed 2013·Granted Aug 1, 2017·3 cites·18 claims
- 0662US11415886B2Lithographic patterning process and resists to use thereinASML NETHERLANDS BV·Filed 2019·Granted Aug 16, 2022·0 cites·9 claims
- 0761US10555407B2Metrology methods, radiation source, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Feb 4, 2020·0 cites·23 claims
- 0859US12271008B2Transmissive diffusorASML NETHERLANDS BV·Filed 2019·Granted Apr 8, 2025·0 cites·29 claims
- 0957US12399428B2Method and apparatus for forming a patterned layer of materialASML NETHERLANDS BV·Filed 2021·Granted Aug 26, 2025·0 cites·20 claims
- 1047US12325911B2Method and apparatus for forming a patterned layer of materialASML NETHERLANDS BV·Filed 2020·Granted Jun 10, 2025·0 cites·17 claims
- 1143US12313980B2Inspection system, lithographic apparatus, and inspection methodASML NETHERLANDS BV·Filed 2019·Granted May 27, 2025·0 cites·20 claims
- 1243US10948837B2Information determining apparatus and methodASML NETHERLANDS BV·Filed 2018·Granted Mar 16, 2021·0 cites·21 claims
- 1340US2021079519A1Method and apparatus for forming a patterned layer of materialASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
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