Inventor · disambiguated record
Andrey Nikipelov
Also filed as: NIKIPELOV ANDREY · NIKIPELOV ANDREY ALEXANDROVICH
32 granted patents·11 pending applications·54 citations·filing 2013–2024
95Inventor score
Top patents by PatentIndex Score
43 records- 0197US10228615B2Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membraneASML NETHERLANDS BV·Filed 2015·Granted Mar 12, 2019·17 cites·28 claims
- 0291US10884339B2Lithographic methodASML NETHERLANDS BV·Filed 2019·Granted Jan 5, 2021·3 cites·27 claims
- 0388US11874607B2Method for providing a wear-resistant material on a body, and composite bodyASML NETHERLANDS BV·Filed 2020·Granted Jan 16, 2024·2 cites·20 claims
- 0488US10908496B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2017·Granted Feb 2, 2021·3 cites·20 claims
- 0584US9853412B2Radiation sourceASML NETHERLANDS BV·Filed 2015·Granted Dec 26, 2017·4 cites·19 claims
- 0683US10580545B2Beam delivery apparatus and methodASML NETHERLANDS BV·Filed 2014·Granted Mar 3, 2020·6 cites·38 claims
- 0780US11170907B2Radioisotope productionASML NETHERLANDS BV·Filed 2016·Granted Nov 9, 2021·4 cites·9 claims
- 0880US10437154B2Lithographic methodASML NETHERLANDS BV·Filed 2017·Granted Oct 8, 2019·2 cites·27 claims
- 0978US12474629B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2023·Granted Nov 18, 2025·0 cites·20 claims
- 1078US9728931B2Electron injector and free electron laserASML NETHERLANDS BV·Filed 2014·Granted Aug 8, 2017·5 cites·43 claims
- 1175US9986628B2Method and apparatus for generating radiationASML NETHERLANDS BV·Filed 2013·Granted May 29, 2018·2 cites·15 claims
- 1272US2023311173A1Membrane cleaning apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1371US11762281B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2020·Granted Sep 19, 2023·0 cites·20 claims
- 1470US11550234B2Object in a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Jan 10, 2023·0 cites·20 claims
- 1570US9773578B2Radiation source-collector and method for manufactureASML NETHERLANDS BV·Filed 2014·Granted Sep 26, 2017·3 cites·17 claims
- 1669US9823572B2Lithographic methodASML NETHERLANDS BV·Filed 2014·Granted Nov 21, 2017·2 cites·15 claims
- 1769US2024353315A1Apparatus and method for cleaning an inspection systemASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1864US12055478B2Apparatus and method for cleaning an inspection systemASML NETHERLANDS BV·Filed 2021·Granted Aug 6, 2024·0 cites·20 claims
- 1964US2021375498A1Radioisotope productionASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 2063US2022276553A1Pellicle membrane for a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 2162US11673169B2Membrane cleaning apparatusASML NETHERLANDS BV·Filed 2019·Granted Jun 13, 2023·0 cites·20 claims
- 2261US11287747B2End facet protection for a radiation source and a method for use in metrology applicationsASML NETHERLANDS BV·Filed 2020·Granted Mar 29, 2022·0 cites·20 claims
- 2359US12271008B2Transmissive diffusorASML NETHERLANDS BV·Filed 2019·Granted Apr 8, 2025·0 cites·29 claims
- 2457US2025102902A1Assembly for a lithographic apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 2555US10103508B2Electron injector and free electron laserASML NETHERLANDS BV·Filed 2017·Granted Oct 16, 2018·0 cites·20 claims
- 2655US2024337956A1Apparatus and method for preparing and cleaning a componentASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2753US10588211B2Radiation source having debris controlASML NETHERLANDS BV·Filed 2014·Granted Mar 10, 2020·1 cites·20 claims
- 2853US10031422B2Lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Jul 24, 2018·0 cites·23 claims
- 2952US2025224667A1Apparatus and method for a lithographic apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 3050US10468225B2Electron source for a free electron laserASML NETHERLANDS BV·Filed 2017·Granted Nov 5, 2019·0 cites·17 claims
- 3150US2023314930A1Apparatus and method for processing a reticle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 3249US12117736B2Lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 15, 2024·0 cites·19 claims
- 3349US11048180B2Component for use in a patterning device environmentASML NETHERLANDS BV·Filed 2019·Granted Jun 29, 2021·0 cites·13 claims
- 3448US11287752B2Cooling apparatus and plasma-cleaning station for cooling apparatusASML NETHERLANDS BV·Filed 2018·Granted Mar 29, 2022·0 cites·20 claims
- 3548US10976196B2Sensor mark and a method of manufacturing a sensor markASML NETHERLANDS BV·Filed 2018·Granted Apr 13, 2021·0 cites·20 claims
- 3647US11143975B2Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling offASML NETHERLANDS BV·Filed 2017·Granted Oct 12, 2021·0 cites·23 claims
- 3745US12332570B2Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debrisASML HOLDING NV·Filed 2020·Granted Jun 17, 2025·0 cites·15 claims
- 3845US9952513B2UndulatorASML NETHERLANDS BV·Filed 2015·Granted Apr 24, 2018·0 cites·20 claims
- 3944US2022082945A1Substrate holder for use in a lithographic apparatus and a method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 4043US12313980B2Inspection system, lithographic apparatus, and inspection methodASML NETHERLANDS BV·Filed 2019·Granted May 27, 2025·0 cites·20 claims
- 4143US10948837B2Information determining apparatus and methodASML NETHERLANDS BV·Filed 2018·Granted Mar 16, 2021·0 cites·21 claims
- 4243US2024142871A1Membrane cleaning apparatusASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 4339US2015264791A1Method and Apparatus for Generating RadiationASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
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