Inventor · disambiguated record
Tokushige Hisatsugu
Also filed as: HISATSUGU TOKUSHIGE
2 granted patents·2 pending applications·54 citations·filing 1981–2007
63Inventor score
Top patents by PatentIndex Score
4 records- 0177US4349409AMethod and apparatus for plasma etchingFUJITSU LTD·Filed 1981·Granted Sep 14, 1982·46 cites·18 claims
- 0260US6913857B2Exposure mask, method for manufacturing the mask, and exposure methodPD SERVICE CORP·Filed 2001·Granted Jul 5, 2005·8 cites·38 claims
- 0341US2007281221A1Stencil maskHOLON CO LTD·Filed 2007·Application pending·0 cites
- 0428US2006124866A1Electron beam exposure method and system thereforHISATSUGU TOKUSHIGE·Filed 2003·Application pending·0 cites
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