Inventor · disambiguated record

Maria Johanna Hendrika Aben

Also filed as: ABEN MARIA JOHANNA HENDRIKA

1 granted patent·9 citations·filing 2011–2011

31Inventor score

Technology areasG03F

Files withABEN MARIA JOHANNA HENDRIKA1

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1 record

0178US9977340B2Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods and apparatusABEN MARIA JOHANNA HENDRIKA·Filed 2011·Granted May 22, 2018·9 cites·17 claims

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