Inventor · disambiguated record
Katsuhiro Kuroda
Also filed as: KURODA KATSUHIRO
46 granted patents·2 pending applications·2,555 citations·filing 1980–2018
99Inventor score
Top patents by PatentIndex Score
48 records- 0199US6172363B1Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 1997·Granted Jan 9, 2001·185 cites·20 claims
- 0298US5412210AScanning electron microscope and method for production of semiconductor device by using the sameHITACHI LTD·Filed 1993·Granted May 2, 1995·148 cites·70 claims
- 0397US6518548B2Substrate temperature control system and method for controlling temperature of substrateHITACHI LTD·Filed 2002·Granted Feb 11, 2003·269 cites·5 claims
- 0497US6394797B1Substrate temperature control system and method for controlling temperature of substrateHITACHI LTD·Filed 2000·Granted May 28, 2002·182 cites·25 claims
- 0597US6329826B1Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2000·Granted Dec 11, 2001·95 cites·4 claims
- 0696US7417444B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2005·Granted Aug 26, 2008·25 cites·7 claims
- 0796US5481109ASurface analysis method and apparatus for carrying out the sameHITACHI LTD·Filed 1993·Granted Jan 2, 1996·121 cites·80 claims
- 0895US6797954B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2003·Granted Sep 28, 2004·42 cites·7 claims
- 0993US6114695AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1999·Granted Sep 5, 2000·62 cites·4 claims
- 1091US5866905AElectron microscopeHITACHI LTD·Filed 1996·Granted Feb 2, 1999·74 cites·12 claims
- 1191US5594245AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1995·Granted Jan 14, 1997·71 cites·20 claims
- 1290US7952074B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2008·Granted May 31, 2011·8 cites·18 claims
- 1390US6979823B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2004·Granted Dec 27, 2005·21 cites·9 claims
- 1490US6051834AElectron microscopeHITACHI LTD·Filed 1998·Granted Apr 18, 2000·65 cites·2 claims
- 1588US5969357AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1997·Granted Oct 19, 1999·43 cites·20 claims
- 1687US7242015B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2005·Granted Jul 10, 2007·6 cites·21 claims
- 1785US6559663B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2001·Granted May 6, 2003·20 cites·10 claims
- 1884US7026830B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2003·Granted Apr 11, 2006·19 cites·6 claims
- 1984US6476390B1Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beamsHITACHI LTD·Filed 1998·Granted Nov 5, 2002·68 cites·16 claims
- 2084US5616926ASchottky emission cathode and a method of stabilizing the sameHITACHI LTD·Filed 1995·Granted Apr 1, 1997·43 cites·50 claims
- 2183US5877498AMethod and apparatus for X-ray analysesHITACHI LTD·Filed 1997·Granted Mar 2, 1999·42 cites·20 claims
- 2283US5866904AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1997·Granted Feb 2, 1999·42 cites·24 claims
- 2383US5838096ACathode having a reservoir and method of manufacturing the sameHITACHI LTD·Filed 1996·Granted Nov 17, 1998·40 cites·8 claims
- 2482US4658136ASecondary electron detecting apparatusHITACHI LTD·Filed 1985·Granted Apr 14, 1987·30 cites·3 claims
- 2580US6511428B1Ultrasonic medical treating deviceHITACHI LTD·Filed 1999·Granted Jan 28, 2003·270 cites·9 claims
- 2679US5490193AX-ray computed tomography systemHITACHI LTD·Filed 1991·Granted Feb 6, 1996·50 cites·32 claims
- 2778US5552602AElectron microscopeHITACHI LTD·Filed 1995·Granted Sep 3, 1996·41 cites·28 claims
- 2875US5763880ACathode, electron beam emission apparatus using the same, and method of manufacturing the cathodeHITACHI LTD·Filed 1996·Granted Jun 9, 1998·33 cites·46 claims
- 2973US5475218AInstrument and method for 3-dimensional atomic arrangement observationHITACHI LTD·Filed 1993·Granted Dec 12, 1995·21 cites·8 claims
- 3073US5162240AMethod and apparatus of fabricating electric circuit pattern on thick and thin film hybrid multilayer wiring substrateHITACHI LTD·Filed 1990·Granted Nov 10, 1992·47 cites·37 claims
- 3173US4893009AScanning electron microscope and the like apparatusHITACHI LTD·Filed 1989·Granted Jan 9, 1990·17 cites·4 claims
- 3272US5666053ACharged particle beam apparatus for measuring magnetic fieldHITACHI LTD·Filed 1995·Granted Sep 9, 1997·25 cites·38 claims
- 3371US5936244AElectron microscope and electron microscopy methodHITACHI LTD·Filed 1995·Granted Aug 10, 1999·23 cites·5 claims
- 3471US5278408AInstrument and method for 3-dimensional atomic arrangement observationHITACHI LTD·Filed 1992·Granted Jan 11, 1994·27 cites·9 claims
- 3571US4475044AApparatus for focus-deflecting a charged particle beamHITACHI LTD·Filed 1980·Granted Oct 2, 1984·15 cites·3 claims
- 3670US5561697AMicrotron electron acceleratorHITACHI MEDICAL CORP·Filed 1995·Granted Oct 1, 1996·52 cites·4 claims
- 3769US5594246AMethod and apparatus for x-ray analysesHITACHI LTD·Filed 1995·Granted Jan 14, 1997·21 cites·75 claims
- 3868US5267294ARadiotherapy apparatusHITACHI MEDICAL CORP·Filed 1992·Granted Nov 30, 1993·121 cites·15 claims
- 3965US4396901AMethod for correcting deflection distortion in an apparatus for charged particle lithographyHITACHI LTD·Filed 1981·Granted Aug 2, 1983·11 cites·11 claims
- 4061US7299741B2Hydraulic pressure actuator and continuous manual athletic device using the sameHITACHI MEDICAL CORP·Filed 2004·Granted Nov 27, 2007·10 cites·23 claims
- 4154US4400622AElectron lens equipmentNIPPON TELEGRAPH & TELEPHONE·Filed 1981·Granted Aug 23, 1983·7 cites·8 claims
- 4253US5811819AElectron beam source and its manufacturing method and electron beam source apparatus and electron beam apparatus using the sameHITACHI LTD·Filed 1995·Granted Sep 22, 1998·10 cites·37 claims
- 4353US5681112AImage enhancementHITACHI LTD·Filed 1992·Granted Oct 28, 1997·23 cites·15 claims
- 4452US11760885B2Aluminum flake pigment and method of producing sameTOYO ALUMINIUM KK·Filed 2018·Granted Sep 19, 2023·0 cites·4 claims
- 4539US2017275497A1Paint composition and painted product having coating formed from the paint compositionTOYO ALUMINIUM KK·Filed 2015·Application pending·0 cites
- 4637US5399873AMicrotron electron acceleratorHITACHI MEDICAL CORP·Filed 1993·Granted Mar 21, 1995·5 cites·25 claims
- 4737US4939045AMagnetic recording mediumHITACHI LTD·Filed 1988·Granted Jul 3, 1990·5 cites·22 claims
- 4831US2002117635A1Patterned wafer inspection method and apparatus thereforFiled 1998·Application pending·0 cites
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