Inventor · disambiguated record

Christoph Sebastian Phiesel

Also filed as: PHIESEL CHRISTOPH SEBASTIAN

1 granted patent·0 citations·filing 2020–2020

6Inventor score

Technology areasG21K

Files withRI RES INSTRUMENTS GMBH1

Top patents by PatentIndex Score

1 record

0135US11615897B2Microscopic system for testing structures and defects on EUV lithography photomasksRI RES INSTRUMENTS GMBH·Filed 2020·Granted Mar 28, 2023·0 cites·11 claims

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