Inventor · disambiguated record
Yuuichi Tachino
Also filed as: TACHINO YUUICHI
2 granted patents·3 pending applications·8 citations·filing 2001–2013
49Inventor score
Top patents by PatentIndex Score
5 records- 0167US6926800B2Plasma etching method and apparatusFUJITSU LTD·Filed 2001·Granted Aug 9, 2005·8 cites·20 claims
- 0248US7906033B2Plasma etching method and apparatusFUJITSU SEMICONDUCTOR LTD·Filed 2005·Granted Mar 15, 2011·0 cites·2 claims
- 0347US2013186340A1Vacuum Film Forming ApparatusULVAC INC·Filed 2013·Application pending·0 cites
- 0445US2007178698A1Substrate processing apparatus and fabrication process of a semiconductor deviceFUJITSU LTD·Filed 2006·Application pending·0 cites
- 0542US2012231553A1Substrate processing apparatus and fabrication process of a semiconductor deviceOKITA YOICHI·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →