Inventor · disambiguated record
Koichi Rokuyama
Also filed as: ROKUYAMA KOICHI
4 granted patents·155 citations·filing 2003–2006
80Inventor score
Top patents by PatentIndex Score
4 records- 0197US7176634B2Coaxial type impedance matching device and impedance detecting method for plasma generationTOKYO ELECTRON LTD·Filed 2004·Granted Feb 13, 2007·115 cites·4 claims
- 0290US7355379B2Coaxial type impedance matching device and impedance detecting method for plasma generationTOKYO ELECTRON LTD·Filed 2006·Granted Apr 8, 2008·16 cites·5 claims
- 0383US6819052B2Coaxial type impedance matching device and impedance detecting method for plasma generationJAPAN RADIO CO LTD·Filed 2003·Granted Nov 16, 2004·16 cites·2 claims
- 0453US6856211B2Coaxial type impedance matching deviceJAPAN RADIO CO LTD·Filed 2003·Granted Feb 15, 2005·8 cites·21 claims
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