Inventor · disambiguated record

Mirko Buechsenschuetz

Also filed as: BUECHSENSCHUETZ MIRKO

1 granted patent·1 pending application·0 citations·filing 2023–2025

10Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH2

Top patents by PatentIndex Score

2 records

0167US2025216794A1Mirror device, for example for a microlithographic projection exposure system, and method for measuring the temperature of a mirrorZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
0266US12372877B2Projection exposure apparatus for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2023·Granted Jul 29, 2025·0 cites·20 claims

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