Inventor · disambiguated record

Kazuhiro Kirihara

Also filed as: KIRIHARA KAZUHIRO

1 granted patent·1 citations·filing 2007–2007

16Inventor score

Technology areasH05H

Files withSHIMIZU YOSHIKI1

Top patents by PatentIndex Score

1 record

0148US8512816B2Method of fabricating thin film by microplasma processing and apparatus for sameSHIMIZU YOSHIKI·Filed 2007·Granted Aug 20, 2013·1 cites·16 claims

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