Inventor · disambiguated record

Zhaohui Xi

Also filed as: XI ZHAOHUI

2 granted patents·10 citations·filing 2011–2013

54Inventor score

Technology areasH10P

Files withADVANCED MICRO FAB EQUIP INC1 YANG JAMES1

Top patents by PatentIndex Score

2 records

0183US9275870B2Plasma processing method and plasma processing deviceADVANCED MICRO FAB EQUIP INC·Filed 2013·Granted Mar 1, 2016·7 cites·20 claims
0267US9099284B2Method and system for autotuning of RF matchYANG JAMES·Filed 2011·Granted Aug 4, 2015·3 cites·6 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →