Inventor · disambiguated record

Dirk Hambach

Also filed as: HAMBACH DIRK

2 granted patents·56 citations·filing 2001–2005

65Inventor score

Technology areasG21K H01J

Files withDEGENHARDT RALF1 LEICA MICROSYSTEM LITHOGRAPHY1

Top patents by PatentIndex Score

2 records

0187US8203119B2Charged particle beam device with retarding field analyzerDEGENHARDT RALF·Filed 2005·Granted Jun 19, 2012·28 cites·43 claims
0273US6859516B2Method for examining structures on a semiconductor substrateLEICA MICROSYSTEM LITHOGRAPHY·Filed 2001·Granted Feb 22, 2005·28 cites·15 claims

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