Inventor · disambiguated record
Kyohyeok Kim
Also filed as: KIM Kyohyeok
6 granted patents·1 pending application·3 citations·filing 2016–2024
69Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0186US11348760B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted May 31, 2022·2 cites·17 claims
- 0271US10892145B2Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jan 12, 2021·1 cites·18 claims
- 0369US12211672B2Apparatus and method for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2024·Granted Jan 28, 2025·0 cites·11 claims
- 0459US11984304B2Apparatus and method for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 14, 2024·0 cites·17 claims
- 0547US11515193B2Etching apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
- 0638US9812335B2Method of forming fine pattern of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 7, 2017·0 cites·19 claims
- 0732US2016314981A1Methods for forming pattern using cyclic processingSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →