Inventor · disambiguated record

Aleksandar Owczarz

Also filed as: OWCZARZ ALEKSANDAR

3 granted patents·25 citations·filing 2001–2004

69Inventor score

Technology areasH10P

Files withLAM RES CORP3

Top patents by PatentIndex Score

3 records

0168US6676493B1Integrated planarization and clean wafer processing systemLAM RES CORP·Filed 2001·Granted Jan 13, 2004·13 cites·22 claims
0263US6767428B1Method and apparatus for chemical mechanical planarizationLAM RES CORP·Filed 2001·Granted Jul 27, 2004·8 cites·13 claims
0354US7033250B2Method for chemical mechanical planarizationLAM RES CORP·Filed 2004·Granted Apr 25, 2006·4 cites·11 claims

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