Inventor · disambiguated record
Yoshikazu Ariga
Also filed as: ARIGA YOSHIKAZU
3 granted patents·2 pending applications·6 citations·filing 2003–2007
56Inventor score
Top patents by PatentIndex Score
5 records- 0154US7155963B2Cleaning evaluation method for a substrateEBARA CORP·Filed 2004·Granted Jan 2, 2007·6 cites·6 claims
- 0240US2008000509A1Cleaning apparatus and cleaning methodYONEKURA RYOSUKE·Filed 2007·Application pending·0 cites
- 0336US7264681B2Cleaning apparatus and cleaning methodEBARA CORP·Filed 2003·Granted Sep 4, 2007·0 cites·5 claims
- 0436US7077730B2Method and apparatus for polishing a workpieceEBARA CORP·Filed 2004·Granted Jul 18, 2006·0 cites·19 claims
- 0533US2005252535A1Substrate cleaning apparatus and methodNISHIOKA YUKIKO·Filed 2004·Application pending·0 cites
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