Inventor · disambiguated record

Youngzhang Huang

Also filed as: HUANG YOUNGZHANG

2 granted patents·67 citations·filing 2003–2005

66Inventor score

Technology areasH01J H10P

Files withAXCELIS TECH INC2

Top patents by PatentIndex Score

2 records

0194US7022984B1Biased electrostatic deflectorAXCELIS TECH INC·Filed 2005·Granted Apr 4, 2006·43 cites·19 claims
0278US6949895B2Unipolar electrostatic quadrupole lens and switching methods for charged beam transportAXCELIS TECH INC·Filed 2003·Granted Sep 27, 2005·24 cites·16 claims

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