Inventor · disambiguated record

Shinji Akima

Also filed as: AKIMA SHINJI

1 granted patent·5 citations·filing 2003–2003

25Inventor score

Technology areasG03F

Files withTOPPAN PRINTING CO LTD1

Top patents by PatentIndex Score

1 record

0150US7037627B2Photomask defect testing method, photomask manufacturing method and semiconductor integrated circuit manufacturing methodTOPPAN PRINTING CO LTD·Filed 2003·Granted May 2, 2006·5 cites·9 claims

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