Inventor · disambiguated record
Toshiaki Iijima
Also filed as: IIJIMA TOSHIAKI
1 granted patent·3 pending applications·0 citations·filing 2017–2025
10Inventor score
Files withASM IP HOLDING BV4
Top patents by PatentIndex Score
4 records- 0159US2025273431A1Hybrid dual frequency plasma method and apparatus for deposition in patterned features on a substrateASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0242US11037780B2Method for manufacturing semiconductor device with helium-containing gasASM IP HOLDING BV·Filed 2017·Granted Jun 15, 2021·0 cites·10 claims
- 0333US2022319832A1Method and system for depositing silicon nitride with intermediate treatment processASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0432US2020075325A1Film forming methodASM IP HOLDING BV·Filed 2018·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →