Inventor · disambiguated record
David Walker
Also filed as: WALKER DAVID · WALKER DAVID L · WALKER DAVID LOUIS
7 granted patents·162 citations·filing 1998–2002
87Inventor score
Files withIBM7
Top patents by PatentIndex Score
7 records- 0182US6352596B2Post CMP cleaning method using a brush cleaner with torque monitorIBM·Filed 2001·Granted Mar 5, 2002·27 cites·18 claims
- 0277US6179693B1In-situ/self-propelled polishing pad conditioner and cleanerIBM·Filed 1998·Granted Jan 30, 2001·44 cites·21 claims
- 0369US6135865ACMP apparatus with built-in slurry distribution and removalIBM·Filed 1998·Granted Oct 24, 2000·27 cites·6 claims
- 0468US6269510B1Post CMP clean brush with torque monitorIBM·Filed 1999·Granted Aug 7, 2001·31 cites·17 claims
- 0566US6299515B1CMP apparatus with built-in slurry distribution and removalIBM·Filed 2000·Granted Oct 9, 2001·10 cites·6 claims
- 0662US6468135B1Method and apparatus for multiphase chemical mechanical polishingIBM·Filed 1999·Granted Oct 22, 2002·23 cites·16 claims
- 0740US7067220B2Pattern compensation techniques for charged particle lithographic masksIBM·Filed 2002·Granted Jun 27, 2006·0 cites·11 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →