Inventor · disambiguated record
Gary J. Beardsley
Also filed as: BEARDSLEY GARY J · BEARDSLEY GARY JOSEPH
6 granted patents·150 citations·filing 1998–2001
86Inventor score
Files withIBM6
Top patents by PatentIndex Score
6 records- 0182US6352596B2Post CMP cleaning method using a brush cleaner with torque monitorIBM·Filed 2001·Granted Mar 5, 2002·27 cites·18 claims
- 0277US6179693B1In-situ/self-propelled polishing pad conditioner and cleanerIBM·Filed 1998·Granted Jan 30, 2001·44 cites·21 claims
- 0369US6135865ACMP apparatus with built-in slurry distribution and removalIBM·Filed 1998·Granted Oct 24, 2000·27 cites·6 claims
- 0468US6269510B1Post CMP clean brush with torque monitorIBM·Filed 1999·Granted Aug 7, 2001·31 cites·17 claims
- 0566US6299515B1CMP apparatus with built-in slurry distribution and removalIBM·Filed 2000·Granted Oct 9, 2001·10 cites·6 claims
- 0642US6387810B2Method for homogenizing device parameters through photoresist planarizationIBM·Filed 1999·Granted May 14, 2002·11 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →