Inventor · disambiguated record
Makoto Takado
Also filed as: TAKADO MAKOTO
1 granted patent·3 pending applications·4 citations·filing 2014–2014
24Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0178US9563209B2Raw material gas supply methodTOKYO ELECTRON LTD·Filed 2014·Granted Feb 7, 2017·4 cites·3 claims
- 0249US2014209021A1Raw material gas supply device, film forming apparatus, flow rate measuring method, and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0348US2015140694A1Gas supply device, film forming apparatus, gas supply method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0438US2014290752A1Processing method and processing apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →