Inventor · disambiguated record
Ronald A. Warren
Also filed as: WARREN RONALD A
24 granted patents·1 pending application·1,145 citations·filing 1991–2007
97Inventor score
Top patents by PatentIndex Score
25 records- 0197US5166096AProcess for fabricating self-aligned contact studs for semiconductor structuresIBM·Filed 1992·Granted Nov 24, 1992·431 cites·18 claims
- 0288US5947053AWear-through detector for multilayered parts and methods of using sameIBM·Filed 1998·Granted Sep 7, 1999·91 cites·18 claims
- 0386US5397684AAntireflective polyimide dielectric for photolithographyIBM·Filed 1993·Granted Mar 14, 1995·38 cites·8 claims
- 0483US5427622AMethod for uniform cleaning of wafers using megasonic energyIBM·Filed 1994·Granted Jun 27, 1995·64 cites·5 claims
- 0582US6036821AEnhanced collimated sputtering apparatus and its method of useIBM·Filed 1998·Granted Mar 14, 2000·38 cites·29 claims
- 0682US5943594AMethod for extended ion implanter source lifetime with control mechanismIBM·Filed 1997·Granted Aug 24, 1999·43 cites·23 claims
- 0781US5441797AAntireflective polyimide dielectric for photolithographyIBM·Filed 1994·Granted Aug 15, 1995·36 cites·10 claims
- 0880US5216282ASelf-aligned contact studs for semiconductor structuresIBM·Filed 1991·Granted Jun 1, 1993·62 cites·7 claims
- 0975US5533540AApparatus for uniform cleaning of wafers using megasonic energyIBM·Filed 1995·Granted Jul 9, 1996·37 cites·14 claims
- 1072US5579792AApparatus for uniform cleaning of wafers using megasonic energyIBM·Filed 1996·Granted Dec 3, 1996·32 cites·15 claims
- 1171US6699400B1Etch process and apparatus thereforFiled 1999·Granted Mar 2, 2004·31 cites·14 claims
- 1270US6282459B1Structure and method for detection of physical interference during transport of an articleIBM·Filed 1998·Granted Aug 28, 2001·37 cites·32 claims
- 1367US5263824ARemote controlled shutdown for hazardous material transport vehicleFREDRON CORP·Filed 1992·Granted Nov 23, 1993·58 cites·16 claims
- 1465US7332054B2Etch apparatusIBM·Filed 2004·Granted Feb 19, 2008·8 cites·12 claims
- 1565US5940724AMethod for extended ion implanter source lifetimeIBM·Filed 1997·Granted Aug 17, 1999·30 cites·17 claims
- 1662US6105274ACryogenic/phase change cooling for rapid thermal process systemsIBM·Filed 1999·Granted Aug 22, 2000·24 cites·12 claims
- 1761US5982225AHot electron compensation for improved MOS transistor reliabilityIBM·Filed 1997·Granted Nov 9, 1999·18 cites·18 claims
- 1859US6580140B1Metal oxide temperature monitorIBM·Filed 2000·Granted Jun 17, 2003·6 cites·15 claims
- 1958US5187121AProcess for fabrication of a semiconductor structure and contact studIBM·Filed 1991·Granted Feb 16, 1993·27 cites·31 claims
- 2052US5536792AAntireflective polymide dielectric for photolithographyIBM·Filed 1995·Granted Jul 16, 1996·12 cites·4 claims
- 2152US2008066864A1Etch apparatusBALLANTINE ARNE W·Filed 2007·Application pending·0 cites
- 2241US6759260B2Metal oxide temperature monitorIBM·Filed 2003·Granted Jul 6, 2004·0 cites·17 claims
- 2341US5539080APolyimide and a semiconductor prepared therefromIBM·Filed 1995·Granted Jul 23, 1996·6 cites·6 claims
- 2441US5352927ASelf-aligned contact studs for semiconductor structuresIBM·Filed 1992·Granted Oct 4, 1994·10 cites·3 claims
- 2535US6339022B1Method of annealing copper metallurgyIBM·Filed 1999·Granted Jan 15, 2002·6 cites·25 claims
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