Inventor · disambiguated record
Kaeko Kitamura
Also filed as: KITAMURA KAEKO
4 granted patents·367 citations·filing 1997–1998
79Inventor score
Files withMITSUBISHI ELECTRIC CORP4
Top patents by PatentIndex Score
4 records- 0195US6265113B1Stress adjustment method of X-ray maskMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Jul 24, 2001·344 cites·18 claims
- 0249US6212252B1X-ray mask provided with an alignment mark and method of manufacturing the sameMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Apr 3, 2001·13 cites·11 claims
- 0338US5905005AX-ray mask and method of fabricating the sameMITSUBISHI ELECTRIC CORP·Filed 1997·Granted May 18, 1999·7 cites·12 claims
- 0429US5879840AFilm-forming method for X-ray maskMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Mar 9, 1999·3 cites·26 claims
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