Inventor · disambiguated record
Hideki Yabe
Also filed as: YABE HIDEKI
11 granted patents·479 citations·filing 1995–2006
91Inventor score
Files withMITSUBISHI ELECTRIC CORP11
Top patents by PatentIndex Score
11 records- 0195US6265113B1Stress adjustment method of X-ray maskMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Jul 24, 2001·344 cites·18 claims
- 0288US6110291AThin film forming apparatus using laserMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Aug 29, 2000·67 cites·3 claims
- 0374US7350406B2Sensor chip breaking strength inspection apparatus and sensor chip breaking strength inspection methodMITSUBISHI ELECTRIC CORP·Filed 2006·Granted Apr 1, 2008·4 cites·14 claims
- 0460US5677090AMethod of making X-ray mask having reduced stressMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Oct 14, 1997·20 cites·7 claims
- 0557US6898267B2X-ray maskMITSUBISHI ELECTRIC CORP·Filed 2002·Granted May 24, 2005·5 cites·7 claims
- 0649US6212252B1X-ray mask provided with an alignment mark and method of manufacturing the sameMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Apr 3, 2001·13 cites·11 claims
- 0741US5496667AX-ray mask and its fabrication methodMITSUBISHI ELECTRIC CORP·Filed 1995·Granted Mar 5, 1996·7 cites·8 claims
- 0840US5953492AMethod of manufacturing X-ray mask and heating apparatusMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Sep 14, 1999·6 cites·10 claims
- 0938US5905005AX-ray mask and method of fabricating the sameMITSUBISHI ELECTRIC CORP·Filed 1997·Granted May 18, 1999·7 cites·12 claims
- 1034US5834142AMethod of manufacturing X-ray mask and heating apparatusMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Nov 10, 1998·3 cites·18 claims
- 1129US5879840AFilm-forming method for X-ray maskMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Mar 9, 1999·3 cites·26 claims
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