Inventor · disambiguated record

Johannes Gerardus Maria Mulder

Also filed as: MULDER JOHANNES GERARDUS MARIA

1 granted patent·0 citations·filing 2015–2015

5Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

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1 record

0136US10656536B2Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted May 19, 2020·0 cites·20 claims

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