Inventor · disambiguated record

Christopher L. Mcadams

Also filed as: MCADAMS CHRISTOPHER L

1 granted patent·20 citations·filing 2001–2001

40Inventor score

Technology areasG03F

Files withUNIV NORTH CAROLINA STATE1

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1 record

0178US6764809B2CO2-processes photoresists, polymers, and photoactive compounds for microlithographyUNIV NORTH CAROLINA STATE·Filed 2001·Granted Jul 20, 2004·20 cites·67 claims

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