Inventor · disambiguated record
Chan Ouk Jung
Also filed as: JUNG CHAN OUK
5 granted patents·1 pending application·110 citations·filing 1997–2001
82Inventor score
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
6 records- 0175US6177320B1Method for forming a self aligned contact in a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Jan 23, 2001·50 cites·30 claims
- 0264US6770567B2Method of reducing particulates in a plasma etch chamber during a metal etch processFiled 2001·Granted Aug 3, 2004·11 cites·29 claims
- 0364US5903351AMethod and apparatus for selective spectroscopic analysis of a wafer surface and gas phase elements in a reaction chamberSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted May 11, 1999·29 cites·14 claims
- 0452US6159811AMethods for patterning microelectronic structures using chlorine, oxygen, and fluorineSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Dec 12, 2000·14 cites·27 claims
- 0538US6087264AMethods for patterning microelectronic structures using chlorine and oxygenSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Jul 11, 2000·6 cites·10 claims
- 0632US2003013314A1Method of reducing particulates in a plasma etch chamber during a metal etch processFiled 2001·Application pending·0 cites
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