Inventor · disambiguated record

Tadashi Mitsunaga

Also filed as: MITSUNAGA Tadashi

2 granted patents·0 citations·filing 2017–2017

23Inventor score

Technology areasH01J H10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0147US10014145B2Vacuum exhaust methodTOKYO ELECTRON LTD·Filed 2017·Granted Jul 3, 2018·0 cites·12 claims
0237US10325801B2Mounting table system, substrate processing apparatus, and temperature control methodTOKYO ELECTRON LTD·Filed 2017·Granted Jun 18, 2019·0 cites·15 claims

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