Inventor · disambiguated record
Lee M. Loewenstein
Also filed as: LOEWENSTEIN LEE · LOEWENSTEIN LEE M
37 granted patents·3,842 citations·filing 1987–2007
99Inventor score
Top patents by PatentIndex Score
37 records- 0199US5002632AMethod and apparatus for etching semiconductor materialsTEXAS INSTRUMENTS INC·Filed 1989·Granted Mar 26, 1991·473 cites·11 claims
- 0299US4820377AMethod for cleanup processing chamber and vacuum process moduleTEXAS INSTRUMENTS INC·Filed 1987·Granted Apr 11, 1989·334 cites·52 claims
- 0398US4916091APlasma and plasma UV deposition of SiO2TEXAS INSTRUMENTS INC·Filed 1988·Granted Apr 10, 1990·494 cites·8 claims
- 0498US4904621ARemote plasma generation process using a two-stage showerheadTEXAS INSTRUMENTS INC·Filed 1987·Granted Feb 27, 1990·287 cites·6 claims
- 0597US4886570AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Dec 12, 1989·160 cites·40 claims
- 0697US4857140AMethod for etching silicon nitrideTEXAS INSTRUMENTS INC·Filed 1988·Granted Aug 15, 1989·252 cites·55 claims
- 0796US6110838AIsotropic polysilicon plus nitride strippingTEXAS INSTRUMENTS INC·Filed 1994·Granted Aug 29, 2000·232 cites·13 claims
- 0896US4828649AMethod for etching an aluminum film doped with siliconTEXAS INSTRUMENTS INC·Filed 1988·Granted May 9, 1989·176 cites·15 claims
- 0995US5138973AWafer processing apparatus having independently controllable energy sourcesTEXAS INSTRUMENTS INC·Filed 1988·Granted Aug 18, 1992·108 cites·14 claims
- 1095US4867841AMethod for etch of polysilicon filmTEXAS INSTRUMENTS INC·Filed 1988·Granted Sep 19, 1989·141 cites·15 claims
- 1193US5262610ALow particulate reliability enhanced remote microwave plasma discharge deviceUS ARMY·Filed 1991·Granted Nov 16, 1993·86 cites·3 claims
- 1293US4818326AProcessing apparatusTEXAS INSTRUMENTS INC·Filed 1988·Granted Apr 4, 1989·124 cites·9 claims
- 1392US4878994AMethod for etching titanium nitride local interconnectsTEXAS INSTRUMENTS INC·Filed 1988·Granted Nov 7, 1989·124 cites·53 claims
- 1491US5248636AProcessing method using both a remotely generated plasma and an in-situ plasma with UV irradiationTEXAS INSTRUMENTS INC·Filed 1992·Granted Sep 28, 1993·86 cites·1 claims
- 1591US4836905AProcessing apparatusTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 6, 1989·117 cites·12 claims
- 1688US4906328AMethod for wafer treatingTEXAS INSTRUMENTS INC·Filed 1988·Granted Mar 6, 1990·42 cites·24 claims
- 1788US4842686AWafer processing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 27, 1989·54 cites·63 claims
- 1887US7732225B2Method for measuring contamination in liquids at PPQ levelsTEXAS INSTRUMENTS INC·Filed 2007·Granted Jun 8, 2010·11 cites·6 claims
- 1987US4822450AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Apr 18, 1989·56 cites·30 claims
- 2079US5102231ASemiconductor wafer temperature measurement system and methodTEXAS INSTRUMENTS INC·Filed 1991·Granted Apr 7, 1992·48 cites·21 claims
- 2179US4875989AWafer processing apparatusTEXAS INSTRUMENTS INC·Filed 1988·Granted Oct 24, 1989·57 cites·18 claims
- 2278US4882008ADry development of photoresistTEXAS INSTRUMENTS INC·Filed 1988·Granted Nov 21, 1989·48 cites·29 claims
- 2378US4872938AProcessing apparatusTEXAS INSTRUMENTS INC·Filed 1988·Granted Oct 10, 1989·51 cites·4 claims
- 2476US4988644AMethod for etching semiconductor materials using a remote plasma generatorTEXAS INSTRUMENTS INC·Filed 1989·Granted Jan 29, 1991·48 cites·6 claims
- 2570US5741396AIsotropic nitride strippingTEXAS INSTRUMENTS INC·Filed 1994·Granted Apr 21, 1998·42 cites·11 claims
- 2667US6114741ATrench isolation of a CMOS structureTEXAS INSTRUMENTS INC·Filed 1997·Granted Sep 5, 2000·29 cites·23 claims
- 2763US5437765ASemiconductor processingTEXAS INSTRUMENTS INC·Filed 1994·Granted Aug 1, 1995·32 cites·13 claims
- 2857US4855016AMethod for etching aluminum film doped with copperTEXAS INSTRUMENTS INC·Filed 1988·Granted Aug 8, 1989·21 cites·24 claims
- 2956US4844773AProcess for etching silicon nitride filmTEXAS INSTRUMENTS INC·Filed 1988·Granted Jul 4, 1989·20 cites·13 claims
- 3054US4842676AProcess for etch of tungstenTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 27, 1989·19 cites·45 claims
- 3152US4830705AMethod for etch of GaAsTEXAS INSTRUMENTS INC·Filed 1988·Granted May 16, 1989·17 cites·15 claims
- 3243US4838984AMethod for etching films of mercury-cadmium-telluride and zinc sulfidTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 13, 1989·11 cites·34 claims
- 3341US5268067AWafer clamping methodTEXAS INSTRUMENTS INC·Filed 1992·Granted Dec 7, 1993·12 cites·10 claims
- 3440US6592676B1Chemical solution and method for reducing the metal contamination on the surface of a semiconductor substrateIMEC INTER UNI MICRO ELECTR·Filed 1999·Granted Jul 15, 2003·9 cites·7 claims
- 3540US4820378AProcess for etching silicon nitride selectively to silicon oxideTEXAS INSTRUMENTS INC·Filed 1987·Granted Apr 11, 1989·9 cites·12 claims
- 3638US6180491B1Isolation structure and methodTEXAS INSTRUMENTS INC·Filed 1999·Granted Jan 30, 2001·6 cites·8 claims
- 3733US5101764AMethod and apparatus for integrating optical sensor into processorTEXAS INSTRUMENTS INC·Filed 1991·Granted Apr 7, 1992·6 cites·20 claims
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