Inventor · disambiguated record
Ming-Liang Yen
Also filed as: YEN MING-LIANG
6 granted patents·1 pending application·16 citations·filing 2013–2023
74Inventor score
Top patents by PatentIndex Score
7 records- 0189US9449841B2Methods and systems for chemical mechanical polish and cleanTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 20, 2016·8 cites·19 claims
- 0287US9048087B2Methods for wet clean of oxide layers over epitaxial layersTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 2, 2015·8 cites·20 claims
- 0364US10755934B2Systems and methods for chemical mechanical polish and cleanTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 25, 2020·0 cites·20 claims
- 0460US2025025403A1Film FormerELEMENTIS SPECIALTIES INC·Filed 2023·Application pending·0 cites
- 0555US10515808B2Systems and methods for chemical mechanical polish and cleanTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 24, 2019·0 cites·20 claims
- 0644US9508716B2Methods of manufacturing a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Nov 29, 2016·0 cites·20 claims
- 0744US9064959B2Method and apparatus for forming a CMOS deviceTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 23, 2015·0 cites·20 claims
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