Inventor · disambiguated record
Knut Beekman
Also filed as: BEEKMAN KNUT
6 granted patents·3 pending applications·185 citations·filing 1999–2009
84Inventor score
Top patents by PatentIndex Score
9 records- 0182US6544858B1Method for treating silicon-containing polymer layers with plasma or electromagnetic radiationTRIKON EQUIP LTD·Filed 1999·Granted Apr 8, 2003·92 cites·37 claims
- 0275US6627535B2Methods and apparatus for forming a film on a substrateTRIKON HOLDINGS LTD·Filed 2001·Granted Sep 30, 2003·30 cites·9 claims
- 0375US6242366B1Methods and apparatus for treating a semiconductor substrateTRIKON EQUIP LTD·Filed 1999·Granted Jun 5, 2001·50 cites·20 claims
- 0467US6929831B2Methods of forming nitride filmsTRIKON HOLDINGS LTD·Filed 2002·Granted Aug 16, 2005·11 cites·28 claims
- 0545US2009170343A1Method and apparatus for treating a semi-conductor substrateAVIZA TECHNOLOGY LTD·Filed 2009·Application pending·0 cites
- 0641US6831010B2Method and depositing a layerTRIKON TECHNOLOGIES LTD·Filed 2000·Granted Dec 14, 2004·2 cites·11 claims
- 0740US2004056356A1Methods and apparatus for forming a film on a substrateFiled 2003·Application pending·0 cites
- 0835US6905962B2Method of depositing a layerTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Jun 14, 2005·0 cites·10 claims
- 0930US2003157781A1Method of filling trenchesFiled 2002·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →