Inventor · disambiguated record
Dmitry Opaits
Also filed as: OPAITS DMITRY FLORYOVYCH · OPAITS Dmitry
5 granted patents·1 pending application·9 citations·filing 2015–2023
69Inventor score
Top patents by PatentIndex Score
6 records- 0191US10132290B2Apparatus and method for aerodynamic performance enhancement of a wind turbineGEN ELECTRIC·Filed 2015·Granted Nov 20, 2018·6 cites·18 claims
- 0275US10312121B2Systems and methods for aligning measurement device in substrate processing systemsLAM RES CORP·Filed 2017·Granted Jun 4, 2019·2 cites·14 claims
- 0366US2023420281A1Reflectometer to monitor substrate movementLAM RES CORP·Filed 2023·Application pending·0 cites
- 0464US9752981B2Apparatus with a spectral reflectometer for processing substratesLAM RES CORP·Filed 2016·Granted Sep 5, 2017·1 cites·17 claims
- 0553US11791189B2Reflectometer to monitor substrate movementLAM RES CORP·Filed 2018·Granted Oct 17, 2023·0 cites·29 claims
- 0644US10224187B1Detecting partial unclamping of a substrate from an ESC of a substrate processing systemLAM RES CORP·Filed 2018·Granted Mar 5, 2019·0 cites·20 claims
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