Inventor · disambiguated record

Henk Jan Van Gerner

Also filed as: VAN GERNER HENK JAN

1 granted patent·13 citations·filing 2012–2012

35Inventor score

Technology areasG21K

Files withDONDERS SJOERD NICOLAAS LAMBERTUS1

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1 record

0185US8610089B2Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning methodDONDERS SJOERD NICOLAAS LAMBERTUS·Filed 2012·Granted Dec 17, 2013·13 cites·19 claims

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