Inventor · disambiguated record
Robert J. Kolenkow
Also filed as: KOLENKOW ROBERT J
3 granted patents·510 citations·filing 1991–1997
80Inventor score
Top patents by PatentIndex Score
3 records- 0196US5205082AWafer polisher head having floating retainer ringCYBEQ SYST INC·Filed 1991·Granted Apr 27, 1993·357 cites·21 claims
- 0289US5873989AMethods and apparatus for linear scan magnetron sputteringINTEVAC INC·Filed 1997·Granted Feb 23, 1999·69 cites·16 claims
- 0389US5830327AMethods and apparatus for sputtering with rotating magnet sputter sourcesINTEVAC INC·Filed 1996·Granted Nov 3, 1998·84 cites·17 claims
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