Inventor · disambiguated record
Christoph Merkl
Also filed as: MERKL CHRISTOPH
4 granted patents·20 citations·filing 2003–2008
69Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0167US7169717B2Method of producing a calibration waferMATTSON THERMAL PRODUCTS GMBH·Filed 2003·Granted Jan 30, 2007·13 cites·20 claims
- 0265US8335658B2Method and apparatus for determining measurement valuesMERKL CHRISTOPH·Filed 2007·Granted Dec 18, 2012·5 cites·36 claims
- 0344US7412299B2Process for determining the temperature of a semiconductor wafer in a rapid heating unitMATTSON THERMAL PRODUCTS GMBH·Filed 2003·Granted Aug 12, 2008·2 cites·42 claims
- 0435US8282272B2Calibration substrate and method of calibration thereforSCHANZ ROLAND·Filed 2008·Granted Oct 9, 2012·0 cites·40 claims
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