Inventor · disambiguated record
Luke Hsu
Also filed as: HSU LUKE
3 granted patents·4 citations·filing 2006–2012
55Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0173US7727682B2System and method for providing phase shift mask passivation layerTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Jun 1, 2010·4 cites·11 claims
- 0252US8624345B2Photomask and photomask substrate with reduced light scattering propertiesWU KEN·Filed 2012·Granted Jan 7, 2014·0 cites·18 claims
- 0347US8198118B2Method for forming a robust mask with reduced light scatteringWU KEN·Filed 2006·Granted Jun 12, 2012·0 cites·20 claims
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